waferNavigator
The waferNavigator application supports fully automatic positioning of structured wafers and lithography masks. Integrated calibration routines for rotation and tilt correction of wafers and integrated stage backlash correction assure precise alignment and positioning. The waferNavigator simplifies complex workflows by automating tasks such as line-width measurement. Entire wafers, single dies or clusters of dies can be handled.

automater / stage control
Universally expandable application environment for automatic control of quantitative analysis processes. Image acquisition, filtering and image pre-processing supported along with data storage and report generation. Image sources available are basic image acquisition, image acquisition with stage support and automatic focus, database, image buffer bar, image series and single images. Integrated stage control supports both user-defined single positions as well as scanning entire sample surfaces.

Imaging C
Imaging C provides users with the C programming language and high-performance image-processing libraries containing more than 8000 commands. Windows API commands and commands from external DLLs are supported. This software extension includes a compiler and a debugger. Programs created using imaging C can be run as add-ins in Scandium.

Required Accessories:

• Scandium Software