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The Scandium Solution Metrology is comprised of special functions for automatically measuring object structures.
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Automatic calliper tool for object structures
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Determines coordinates, intercepts, angles, radii and distances
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Automatic execution of recurring measurement
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Line width measurements on semiconductor structures
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Statistical evaluation of critical dimensions (CD)
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Thickness of single or multiple layers of cross-sectional samples
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| Add-in |
Description |
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Signal/image processing: Original, Noise filtered, First and second derivative
Peak detection methods: Cut, Relative, Absolute
Threshold methods: Edge, Slope, Regression
Measuring parameters: Length, Distance, Angle, X-Position, Y-Position
Data output: Sheet, Overlay |
| LineWidth |
Signal/image processing: Original, Noise filtered, derivative
Peak detection methods: Cut, Relative, Absolute
Threshold methods: Edge, Slope, Regression, Cracks
Measuring parameters: width, Pitch-left, Pitch-right, Space, Total distance, Left border, Right border, Y-value
Data output: Sheet, Overlay
Verification methods: Sheet / image link, Image / sheet link
Statistic evaluation: Count, Mean value, Standard deviation
Data filtering: Filtering by standard deviation, Manual filtering |
| LTM (Layer Thickness Measurements) |
Convenient tool for measuring layer thicknesses in cross sections
Supports any layer geometry and orientation
Supports multiple layers - coherent or not coherent
Concept of neutral fibers for high precision measurements
Multitude of neutral fiber definable
Result sheet includes statistics
Support of tolerances for every single layer
Layer structures can be saved for later use including all parameters |
| Imaging C |
Programming language with macro recording, interpreter and compiler
Scripting of named arguments
Integrated MDI editor and command window
Integrated debugger
Function and symbol browser
Comprehensive function and object library |
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ADDA3 - SEM / STEM Scan Interface
Upgrade your old analog or digital scanning electron microscope to a modern high performance device.
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