act (automatic caliper tool)
performs complex, repeatedly applied measurement sequences automatically as well as measurements made within images. Any displacement of measurement objects within an image are automatically taken into consideration during measurement. act detects edges within images and calculates coordinates, intercept points, angles, radii and distances based on these edges. The geometric elements determined in this way can be linked via further measurement rules. In the learn mode, measurement sequences of varying complexity can thus be defined and saved as profiles.

linewidth
linewidth is a software add-in for measuring line width - especially for semiconductor structures.

ltm (layer thickness measurement)
ltm is an add-in for measuring layer thickness of single or multiple layers of cross-sectional samples. ltm measures layer thicknesses either perpendicular to neutral fibers or via the shortest distance. Measurement is supported of layers that are level or uneven in any way. Layer boundaries can be specified using line segments, polygons, freehand polygons, curves or particle boundaries*.
The following measurement modes are supported when measuring between layer boundaries:

• multiple measurements between layer boundaries defined automatically* or manually
• selected single measurements between layer boundaries defined automatically* or manually
• interactive measurement of any distance
• interactive measurement of any distance perpendicular to neutral fibers

Imaging C
Imaging C provides users with the C programming language and high-performance image-processing libraries containing more than 8000 commands. Windows API commands and commands from external DLLs are supported. This software extension includes a compiler and a debugger. Programs created using imaging C can be run as add-ins in Scandium.

Required Accessories:

• Scandium Software